GaN-on-Silicon Pressure Flow and Thermal Conductivity Sensors for Harsh Environments
Short description of portfolio item number 1
Short description of portfolio item number 1
Short description of portfolio item number 2
Bachelors level disertation on interactions between physiological signals
Published in IEEE Sensors Journal, 2019
Recommended citation: E. L. W. Gardner et al., "MEMS Thermal Flow Sensors— An Accuracy Investigation," in IEEE Sensors Journal, vol. 19, no. 8, pp. 2991-2998, 15 April15, 2019, doi: 10.1109/JSEN.2019.2891596. https://ieeexplore.ieee.org/abstract/document/8607055
Published in Conference: IEEE Sensors 2019, 2019
Recommended citation: G. R. Jones et al., "GaN-on-Si Thermoresistive Flow Sensor with Gold Hot-wire," 2019 IEEE SENSORS, Montreal, QC, Canada, 2019, pp. 1-4, doi: 10.1109/SENSORS43011.2019.8956653. https://ieeexplore.ieee.org/abstract/document/8956653
Published in Conference: IEEE Sensors 2019, 2019
Recommended citation: E. L. W. Gardner, A. De Luca, T. Vincent, R. G. Jones, J. W. Gardner and F. Udrea, "Thermal Conductivity Sensor with Isolating Membrane Holes," 2019 IEEE SENSORS, Montreal, QC, Canada, 2019, pp. 1-4, doi: 10.1109/SENSORS43011.2019.8956842. https://ieeexplore.ieee.org/abstract/document/8956842
Published:
In this paper we present for the first time a Gallium Nitride-on-Silicon (GaN-on-Si) anenometric flow sensor based on a gold (Au) thermoresistive hot-wire. The device was fabricated in a custom GaN process, with an etching process to release a membrane made of the GaN stack. This membrane thermally isolates the hot-wire, increasing its thermal efficiency, which was measured to be 1.04°C/mW. Testing was performed at mass flow rates from 0-4 SLPM using a custom gas rig. The sensitivity of the device, driven in a constant current mode at 3 different zero-flow temperatures, was compared showing an increase in peak sensitivity of 67% at 250°C compared to 150°C.
Published:
79th Colloquium of the Gas Analysis and Sensing Group: MEMS the word - Solid state integrated gas sensors
Undergraduate course, University of Wariwck, School of Engieering, 2019
I co-lectured on the 3rd year MEng, and final-year BEng module Fundamentals of Mordern VSLI Design with Prof. Marina Cole.