GaN based Thermal Conductivity Gas Sensors
Date:
79th Colloquium of the Gas Analysis and Sensing Group: MEMS the word - Solid state integrated gas sensors
Delivered a talk on novel Gallium Nitride based thermal conductivity gas sensors, outlining an AlGaN/GaN device utilising the calorimetric principle. This device used a gold resistive heater with up and down stream thermopiles formed at the junction of gold and 2-Dimensional Electron Gas (2-DEG) layer. Neural networks were used to decouple the linked effects of flow rate and thermal conductivity of the Hydrogen-Nitrogen gas mixture.